| Datum prijs | 16 jul. 2021 |
|---|---|
| Originele taal | Engels |
| Begeleider | Marc J.M. Merkx (Afstudeerdocent 1) & Adrie J.M. Mackus (Afstudeerdocent 2) |
Precursor blocking mechanisms of aniline inhibitor molecules in area-selective atomic layer deposition of TaN
Scriptie/Masterproef: Master