| Datum prijs | 2013 |
|---|---|
| Originele taal | Engels |
| Begeleider | I.J.M. Erkens (Afstudeerdocent 1) & W.M.M. (Erwin) Kessels (Afstudeerdocent 2) |
Citeer dit
- Standard
Plasma-assisted atomic layer deposition of PtOx in high aspect ratio trenches
Scriptie/Masterproef: Bachelor