Multi-layer barriers on polymer (PEN) substrate
: analysis of thin Al2O3 ALD films on fast deposited SiOx buffer layers

  • J.R.G. Schalken

Scriptie/Masterproef: Bachelor

Datum prijs18 nov 2012
Originele taalEngels
BegeleiderM. (Adriana) Creatore (Afstudeerdocent 1) & Hindrik Vries, de (Externe coach)

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