| Datum prijs | 2010 |
|---|---|
| Originele taal | Engels |
| Begeleider | P.C.J.N. (Nick) Rosielle (Afstudeerdocent 1) |
Citeer dit
- Standard
Light weight short stroke stage design for Ø 450 mm wafers: an iterative FEM approach
Scriptie/Masterproef: Master