Functional analysis of retarding field energy analyzers for ion energy distribution measurements in plasma enhanced atomic layer deposition

  • Jan W. Buiter

Scriptie/masterproef: Master

Uittreksel

Datum Prijs2018
TaalEngels
BegeleiderKarsten Arts (Afstudeerdocent 1), W.M.M. (Erwin) Kessels (Afstudeerdocent 2) & Harm C.M. Knoops (Afstudeerdocent 2)

Citeer dit

Functional analysis of retarding field energy analyzers for ion energy distribution measurements in plasma enhanced atomic layer deposition
Buiter, J. W. (Auteur). 2018

Scriptie/masterproef: Master