Film damage by photons, ions and radicals during plasma-enhanced atomic layer deposition

  • M. Smits

Scriptie/Masterproef: Bachelor

Datum prijs2019
Originele taalEngels
BegeleiderKarsten Arts (Afstudeerdocent 1) & Harm C.M. Knoops (Afstudeerdocent 2)

Citeer dit

'