Characterization of precursor blocking during area-selective ALD
: Studied with probe molecules and infrared spectroscopy

  • Roy H.J. Clevis

Scriptie/Masterproef: Master

Datum prijs11 jun. 2021
Originele taalEngels
BegeleiderAdrie J.M. Mackus (Afstudeerdocent 1), Jun Li (Afstudeerdocent 2) & Marc J.M. Merkx (Afstudeerdocent 2)

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