Wavelength- and energy-dispersive Electron Probe Microanalysis (EPMA) measurements with non-perpendicular incidence of the electron beam

G.F. Bastin, P.J.T.L. Oberndorff, H.J.M. Heijligers, J.M. Dijkstra

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

4 Citaten (Scopus)

Samenvatting

A database of 416 wavelength- and energy-dispersive EPMA measurements on tilted specimens of NiAl, TiO2 and Ti3Al is presented. The analyses were performed between 10 and 30 kV and the tilt angles were varied between 0° and 60° in seven steps. The necessary hardware modifications for the specimen holder are discussed, as well as the various focusing techniques used in the measurements. A comparison between the experimental data, the calculations of our proza96t program and the results of Monte Carlo simulations shows that up to 50° tilt the predictions of our software are more than satisfactory. At larger tilt angles some deviations become noticeable. The Monte Carlo simulations appear to produce deviations at a somewhat earlier stage already, for reasons as yet unknown.
Originele taal-2Engels
Pagina's (van-tot)52-57
TijdschriftJournal of Microscopy
Volume224
Nummer van het tijdschrift1
DOI's
StatusGepubliceerd - 2006

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