Void formation and dust cloud structure in (a)symmetric RF discharges

W.J. Goedheer, M.R. Akdim, V. Land

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

1 Citaat (Scopus)

Samenvatting

The behaviour of dust particles in a discharge is the result of the concerted action of the charging process and forces like gravity, the ion and neutral drag force, and the thermophoretic force. Since the ion drag force plays a major role, the reactor geometry and the ion density profile are important parameters. In this paper we study the influence of the geometrical features of a radio-frequency discharge, such as asymmetry, ring electrodes, and a depression in the electrodes.

Originele taal-2Engels
TitelNew Vistas in Dusty Plasmas: Fourth International Conference on the Physics of Dusty Plasmas, 13-17 June 2005, Orleans, France
Plaats van productieNew York
UitgeverijAmerican Institute of Physics
Pagina's367-370
Aantal pagina's4
ISBN van geprinte versie0735402876, 9780735402874
DOI's
StatusGepubliceerd - 31 okt. 2005
Extern gepubliceerdJa
Evenement4th International Conference on the Physics of Dusty Plasmas - Orleans, Frankrijk
Duur: 13 jun. 200517 jun. 2005

Publicatie series

NaamAIP Conference Proceedings
Volume799

Congres

Congres4th International Conference on the Physics of Dusty Plasmas
Land/RegioFrankrijk
StadOrleans
Periode13/06/0517/06/05

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