UV photoannealing and RTP of thin sol-gel films

R. E. Van de Leest; F. Roozeboom

UV photoannealing and RTP of thin sol-gel films

R. E. Van de Leest
, F. Roozeboom

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

Samenvatting

Various annealing methods for sol-gel films have been investigated. Thermal, photothermal, RTP and excimer laser annealing have been used to convert sol-gel precursor films into oxidic films. RTP annealing of sol-gel films yields better results than classical thermal annealing or excimer laser irradiation. Photochemical effects during RTP annealing contribute to obtain high-quality oxide films. The various annealing methods are illustrated by the annealing of alkoxide precursor films of tantalum, iron, nickel and yttrium.

Originele taal-2	Engels
Titel	1996 MRS Spring Symposium
Plaats van productie	Warrendale
Uitgeverij	Materials Research Society
Pagina's	193-201
Aantal pagina's	9
Status	Gepubliceerd - 1 dec. 1996
Extern gepubliceerd	Ja
Evenement	1996 MRS Spring Meeting & Exhibit - San Francisco, Verenigde Staten van Amerika Duur: 8 apr. 1996 → 12 apr. 1996 https://www.mrs.org/spring1996

Publicatie series

Naam	Materials Research Society Symposium - Proceedings
Volume	429
ISSN van geprinte versie	0272-9172

Congres

Congres	1996 MRS Spring Meeting & Exhibit
Land/Regio	Verenigde Staten van Amerika
Stad	San Francisco
Periode	8/04/96 → 12/04/96
Ander	Spring '96 ; MRS 1996 Spring meeting April 8-12, 1996 San Francisco
Internet adres	https://www.mrs.org/spring1996

Andere bestanden en links

Link to publication in Scopus

Citeer dit

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title = "UV photoannealing and RTP of thin sol-gel films",

abstract = "Various annealing methods for sol-gel films have been investigated. Thermal, photothermal, RTP and excimer laser annealing have been used to convert sol-gel precursor films into oxidic films. RTP annealing of sol-gel films yields better results than classical thermal annealing or excimer laser irradiation. Photochemical effects during RTP annealing contribute to obtain high-quality oxide films. The various annealing methods are illustrated by the annealing of alkoxide precursor films of tantalum, iron, nickel and yttrium.",

author = "\{Van de Leest\}, \{R. E.\} and F. Roozeboom",

year = "1996",

month = dec,

day = "1",

language = "English",

series = "Materials Research Society Symposium - Proceedings",

publisher = "Materials Research Society",

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booktitle = "1996 MRS Spring Symposium",

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note = "1996 MRS Spring Meeting \& Exhibit ; Conference date: 08-04-1996 Through 12-04-1996",

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TY - GEN

T1 - UV photoannealing and RTP of thin sol-gel films

AU - Van de Leest, R. E.

AU - Roozeboom, F.

PY - 1996/12/1

Y1 - 1996/12/1

N2 - Various annealing methods for sol-gel films have been investigated. Thermal, photothermal, RTP and excimer laser annealing have been used to convert sol-gel precursor films into oxidic films. RTP annealing of sol-gel films yields better results than classical thermal annealing or excimer laser irradiation. Photochemical effects during RTP annealing contribute to obtain high-quality oxide films. The various annealing methods are illustrated by the annealing of alkoxide precursor films of tantalum, iron, nickel and yttrium.

AB - Various annealing methods for sol-gel films have been investigated. Thermal, photothermal, RTP and excimer laser annealing have been used to convert sol-gel precursor films into oxidic films. RTP annealing of sol-gel films yields better results than classical thermal annealing or excimer laser irradiation. Photochemical effects during RTP annealing contribute to obtain high-quality oxide films. The various annealing methods are illustrated by the annealing of alkoxide precursor films of tantalum, iron, nickel and yttrium.

UR - https://www.scopus.com/pages/publications/0030400495

M3 - Conference contribution

AN - SCOPUS:0030400495

T3 - Materials Research Society Symposium - Proceedings

SP - 193

EP - 201

BT - 1996 MRS Spring Symposium

PB - Materials Research Society

CY - Warrendale

T2 - 1996 MRS Spring Meeting & Exhibit

Y2 - 8 April 1996 through 12 April 1996

ER -

UV photoannealing and RTP of thin sol-gel films

Samenvatting

Publicatie series

Congres

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