Two‐dimensional distributions of C2, CH, and OH in a diamond depositing oxyacetylene flame measured by laser induced fluorescence

R.J.H. Klein-Douwel, J.J.L. Spaanjaars, J.J. Meulen, ter

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    Samenvatting

    Two-dimensional laser induced fluorescence measurements are applied tothe chemical vapor deposition of diamond by an oxyacetylene flame. Thefluorescence distributions of C2, CH, and OH are measured forvarious deposition conditions. The influence of the temperature of themolybdenum substrate and the distance between the substrate and theflame front on the two-dimensional distributions and on the quality andmorphology of the deposited diamond is investigated. A relation isobserved between the C2 distribution in the flame and thelocal growth rate and quality of the diamond layer, thereforeC2 is thought to be an important species for diamond growth.The exact role of CH as a growth species is less clear; OH seems to beof minor importance. All measurements are performed during diamonddeposition.

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    Originele taal-2Engels
    Pagina's (van-tot)2086-2096
    TijdschriftJournal of Applied Physics
    Volume78
    Nummer van het tijdschrift3
    DOI's
    StatusGepubliceerd - 1995

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