Samenvatting
Photo-ionization is applied to a laser cooled and compressed atomic rubidium
beam in order to generate a high brightness ion beam. When focused, this ion beam can be used to image and edit integrated circuits at the nano-scale which is important for the ongoing reduction of feature sizes in the semiconductor industry. Experiments have shown that an atomic beam brightness in excess of 106 A/(m2 sr eV) can be achieved with a flux equivalent to 500 pA in a compact magneto-optical compressor which should be sufficient to generate ion spots of 1 nm. Currently, photo-ionization experiments are being carried out that aim at ionizing the majority of the atoms within a small longitudinal
range in order to minimize the longitudinal energy spread. The two step ionization setup uses a tightly focused excitation laser beam and a powerful blue laser coupled to a build-up-cavity.
beam in order to generate a high brightness ion beam. When focused, this ion beam can be used to image and edit integrated circuits at the nano-scale which is important for the ongoing reduction of feature sizes in the semiconductor industry. Experiments have shown that an atomic beam brightness in excess of 106 A/(m2 sr eV) can be achieved with a flux equivalent to 500 pA in a compact magneto-optical compressor which should be sufficient to generate ion spots of 1 nm. Currently, photo-ionization experiments are being carried out that aim at ionizing the majority of the atoms within a small longitudinal
range in order to minimize the longitudinal energy spread. The two step ionization setup uses a tightly focused excitation laser beam and a powerful blue laser coupled to a build-up-cavity.
| Originele taal-2 | Engels |
|---|---|
| Pagina's | 64-64 |
| Aantal pagina's | 1 |
| Status | Gepubliceerd - 11 okt. 2016 |
| Evenement | 40th Annual Meeting of the section Atomic Molecular and Optical Physics - Conference Center De Werelt , Lunteren, Nederland Duur: 11 okt. 2016 → 12 okt. 2016 Congresnummer: 40 |
Congres
| Congres | 40th Annual Meeting of the section Atomic Molecular and Optical Physics |
|---|---|
| Land/Regio | Nederland |
| Stad | Lunteren |
| Periode | 11/10/16 → 12/10/16 |