Trade-off between the control bandwidth and the measurement accuracy in Atomic Force Microscopy

S. Kuiper; P.M.J. Hof, Van den; G. Schitter

doi:10.1109/I2MTC.2012.6229192

Trade-off between the control bandwidth and the measurement accuracy in Atomic Force Microscopy

S. Kuiper, P.M.J. Hof, Van den, G. Schitter

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

1 Citaat (Scopus)

Samenvatting

In Atomic Force Microscopy the force between the tip and the sample is controlled in a feedback loop in order to prevent damage to the tip and the sample during scanning, and also to convert the force measurement into an estimate of the sample topography. In this paper it is experimentally shown that within the design of the control system a direct trade-off has to be made between the bandwidth of the feedback loop and the accuracy of the topography estimation due to the dynamical uncertainty of the systems. Several method are suggested to reduce the dynamical uncertainty of the imaging system to allow both faster and more accurate AFM imaging. Moreover, a method is discussed and experimentally validated to compensate for the loss in imaging accuracy due to the hysteresis within the piezoelectric actuators.

Originele taal-2	Engels
Titel	Proceedings of the 2012 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 13-16 May 2012, Graz, Austria
Plaats van productie	Piscataway
Uitgeverij	Institute of Electrical and Electronics Engineers
Pagina's	888-893
ISBN van geprinte versie	978-1-4577-1771-0
DOI's	https://doi.org/10.1109/I2MTC.2012.6229192
Status	Gepubliceerd - 2012
Evenement	2012 IEEE International Instrumentation and Measurement Technology Conference, 12MTC 2012 - Graz, Oostenrijk Duur: 13 mei 2012 → 16 mei 2012

Congres

Congres	2012 IEEE International Instrumentation and Measurement Technology Conference, 12MTC 2012
Verkorte titel	12MTC 2012
Land/Regio	Oostenrijk
Stad	Graz
Periode	13/05/12 → 16/05/12
Ander	International Instrumentation and Measurement Technology Conference

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10.1109/I2MTC.2012.6229192

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Kuiper, S., Hof, Van den, P. M. J., & Schitter, G. (2012). Trade-off between the control bandwidth and the measurement accuracy in Atomic Force Microscopy. In Proceedings of the 2012 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 13-16 May 2012, Graz, Austria (blz. 888-893). Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/I2MTC.2012.6229192

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title = "Trade-off between the control bandwidth and the measurement accuracy in Atomic Force Microscopy",

abstract = "In Atomic Force Microscopy the force between the tip and the sample is controlled in a feedback loop in order to prevent damage to the tip and the sample during scanning, and also to convert the force measurement into an estimate of the sample topography. In this paper it is experimentally shown that within the design of the control system a direct trade-off has to be made between the bandwidth of the feedback loop and the accuracy of the topography estimation due to the dynamical uncertainty of the systems. Several method are suggested to reduce the dynamical uncertainty of the imaging system to allow both faster and more accurate AFM imaging. Moreover, a method is discussed and experimentally validated to compensate for the loss in imaging accuracy due to the hysteresis within the piezoelectric actuators.",

author = "S. Kuiper and {Hof, Van den}, P.M.J. and G. Schitter",

year = "2012",

doi = "10.1109/I2MTC.2012.6229192",

language = "English",

isbn = "978-1-4577-1771-0",

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booktitle = "Proceedings of the 2012 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 13-16 May 2012, Graz, Austria",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

note = "2012 IEEE International Instrumentation and Measurement Technology Conference, 12MTC 2012, 12MTC 2012 ; Conference date: 13-05-2012 Through 16-05-2012",

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Kuiper, S, Hof, Van den, PMJ & Schitter, G 2012, Trade-off between the control bandwidth and the measurement accuracy in Atomic Force Microscopy. in Proceedings of the 2012 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 13-16 May 2012, Graz, Austria. Institute of Electrical and Electronics Engineers, Piscataway, blz. 888-893, 2012 IEEE International Instrumentation and Measurement Technology Conference, 12MTC 2012, Graz, Oostenrijk, 13/05/12. https://doi.org/10.1109/I2MTC.2012.6229192

Trade-off between the control bandwidth and the measurement accuracy in Atomic Force Microscopy. / Kuiper, S.; Hof, Van den, P.M.J.; Schitter, G.
Proceedings of the 2012 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 13-16 May 2012, Graz, Austria. Piscataway: Institute of Electrical and Electronics Engineers, 2012. blz. 888-893.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

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AU - Schitter, G.

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N2 - In Atomic Force Microscopy the force between the tip and the sample is controlled in a feedback loop in order to prevent damage to the tip and the sample during scanning, and also to convert the force measurement into an estimate of the sample topography. In this paper it is experimentally shown that within the design of the control system a direct trade-off has to be made between the bandwidth of the feedback loop and the accuracy of the topography estimation due to the dynamical uncertainty of the systems. Several method are suggested to reduce the dynamical uncertainty of the imaging system to allow both faster and more accurate AFM imaging. Moreover, a method is discussed and experimentally validated to compensate for the loss in imaging accuracy due to the hysteresis within the piezoelectric actuators.

AB - In Atomic Force Microscopy the force between the tip and the sample is controlled in a feedback loop in order to prevent damage to the tip and the sample during scanning, and also to convert the force measurement into an estimate of the sample topography. In this paper it is experimentally shown that within the design of the control system a direct trade-off has to be made between the bandwidth of the feedback loop and the accuracy of the topography estimation due to the dynamical uncertainty of the systems. Several method are suggested to reduce the dynamical uncertainty of the imaging system to allow both faster and more accurate AFM imaging. Moreover, a method is discussed and experimentally validated to compensate for the loss in imaging accuracy due to the hysteresis within the piezoelectric actuators.

U2 - 10.1109/I2MTC.2012.6229192

DO - 10.1109/I2MTC.2012.6229192

M3 - Conference contribution

SN - 978-1-4577-1771-0

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BT - Proceedings of the 2012 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 13-16 May 2012, Graz, Austria

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Kuiper S, Hof, Van den PMJ, Schitter G. Trade-off between the control bandwidth and the measurement accuracy in Atomic Force Microscopy. In Proceedings of the 2012 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 13-16 May 2012, Graz, Austria. Piscataway: Institute of Electrical and Electronics Engineers. 2012. blz. 888-893 doi: 10.1109/I2MTC.2012.6229192

Trade-off between the control bandwidth and the measurement accuracy in Atomic Force Microscopy

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