Toward understanding wear particle generation on silicon wafers

Tom Bertens

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Originele taal-2	Engels
Toekennende instantie	Mechanics of Materials
Begeleider(s)/adviseur	Hoefnagels, Johan P.M., Begeleider Geers, Marc G.D., Commissielid van den Broek, Kasper, Externe begeleider, Externe Persoon
Proefschriftsponsors	VDL Enabling Techn.Group Eindh.
Plaats van publicatie	Eindhoven
Uitgever	Technische Universiteit Eindhoven
Status	Gepubliceerd - 30 nov. 2023

EngD thesis.

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@phdthesis{55e0fb0495154ff383b5082136edad48,

title = "Toward understanding wear particle generation on silicon wafers",

author = "Tom Bertens",

note = "EngD thesis.",

year = "2023",

month = nov,

day = "30",

language = "English",

series = "EngD Thesis",

publisher = "Technische Universiteit Eindhoven",

type = "EngD Thesis",

school = "Mechanics of Materials",

}