@inproceedings{92bfc17c7b89445bb08aae9952187826,
title = "Towards high energy density 3D-integrated lithium-ion micro-batteries",
abstract = "To investigate the feasibility of a 3D integrated all-solid-state micro-battery, the deposition of several battery materials was investigated. Deposition techniques where used that are in principle able to deposit step conformally in 3D structures: ALD was used to create a conductive Pt current collector, and LPCVD was applied for the deposition of poly-silicon anodes and LiCoO2 cathodes. The layers, initially deposited on planar substrates, showed the expected physical and electrochemical behavior and are in principle suitable for solid state micro-batteries.",
author = "J.F.M. Oudenhoven and L. Baggetto and R.A.H. Niessen and H.C.M. Knoops and M.E. Donders and \{van Dongen\}, T. and \{de Croon\}, M.H.J.M. and W.M.M. Kessels and P.H.L. Notten",
year = "2009",
month = dec,
day = "1",
doi = "10.1557/PROC-1168-P01-03",
language = "English",
isbn = "9781615677818",
series = "Materials Research Society Symposium Proceedings ",
publisher = "Materials Research Society",
pages = "19--27",
booktitle = "Three-Dimensional Architectures for Energy Generation and Storage",
address = "United States",
note = "2009 Materials Research Society Spring Meeting ; Conference date: 13-04-2009 Through 17-04-2009",
}