Towards high energy density 3D-integrated lithium-ion micro-batteries

J.F.M. Oudenhoven, L. Baggetto, R.A.H. Niessen, H.C.M. Knoops, M.E. Donders, T. van Dongen, M.H.J.M. de Croon, W.M.M. Kessels, P.H.L. Notten

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Samenvatting

To investigate the feasibility of a 3D integrated all-solid-state micro-battery, the deposition of several battery materials was investigated. Deposition techniques where used that are in principle able to deposit step conformally in 3D structures: ALD was used to create a conductive Pt current collector, and LPCVD was applied for the deposition of poly-silicon anodes and LiCoO2 cathodes. The layers, initially deposited on planar substrates, showed the expected physical and electrochemical behavior and are in principle suitable for solid state micro-batteries.

Originele taal-2Engels
TitelThree-Dimensional Architectures for Energy Generation and Storage
UitgeverijMaterials Research Society
Pagina's19-27
Aantal pagina's9
ISBN van geprinte versie9781615677818
DOI's
StatusGepubliceerd - 1 dec 2009
Evenement2009 Materials Research Society Spring Meeting - San Francisco, Verenigde Staten van Amerika
Duur: 13 apr 200917 apr 2009

Publicatie series

NaamMaterials Research Society Symposium Proceedings
Volume1168

Congres

Congres2009 Materials Research Society Spring Meeting
LandVerenigde Staten van Amerika
StadSan Francisco
Periode13/04/0917/04/09
AnderMaterials Research Society 2009

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  • Citeer dit

    Oudenhoven, J. F. M., Baggetto, L., Niessen, R. A. H., Knoops, H. C. M., Donders, M. E., van Dongen, T., de Croon, M. H. J. M., Kessels, W. M. M., & Notten, P. H. L. (2009). Towards high energy density 3D-integrated lithium-ion micro-batteries. In Three-Dimensional Architectures for Energy Generation and Storage (blz. 19-27). (Materials Research Society Symposium Proceedings ; Vol. 1168). Materials Research Society. https://doi.org/10.1557/PROC-1168-P01-03