Toward a fully monitored Fourier transform infrared spectroscopic ellipsometry

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Hoofdstuk › Academic › peer review

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Originele taal-2	Engels
Titel	Frontiers in Low Temperature Plasma Diagnostics III : book of papers
Plaats van productie	Lausanne, Switzerland
Uitgeverij	Ecole Polytechnique Fédérale de Lausanne
Pagina's	131-133
Status	Gepubliceerd - 1999

@inbook{88561c7a00fd4dbcbfef0c03bfd32a56,

title = "Toward a fully monitored Fourier transform infrared spectroscopic ellipsometry",

abstract = "No abstract.",

author = "J.C. Cigal and G.M.W. Kroesen",

year = "1999",

language = "English",

pages = "131--133",

booktitle = "Frontiers in Low Temperature Plasma Diagnostics III : book of papers",

publisher = "Ecole Polytechnique F{\'e}d{\'e}rale de Lausanne",

}

Toward a fully monitored Fourier transform infrared spectroscopic ellipsometry. / Cigal, J.C.; Kroesen, G.M.W.
Frontiers in Low Temperature Plasma Diagnostics III : book of papers. Lausanne, Switzerland: Ecole Polytechnique Fédérale de Lausanne, 1999. blz. 131-133.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Hoofdstuk › Academic › peer review

TY - CHAP

T1 - Toward a fully monitored Fourier transform infrared spectroscopic ellipsometry

AU - Cigal, J.C.

AU - Kroesen, G.M.W.

PY - 1999

Y1 - 1999

N2 - No abstract.

AB - No abstract.

M3 - Chapter

SP - 131

EP - 133

BT - Frontiers in Low Temperature Plasma Diagnostics III : book of papers

PB - Ecole Polytechnique Fédérale de Lausanne

CY - Lausanne, Switzerland

ER -