Three generations of stage control and architecture

H. Butler

Three generations of stage control and architecture

Control Systems

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

Originele taal-2	Engels
Titel	Proceedings of the 7th Conference of the European sociaty for Precision Engineering and Nanotechnology (EUSPEN 2007), May 20th - May 24th 2007, Bremen, Germany
Plaats van productie	Bremen, Germany
Pagina's	153-156
Status	Gepubliceerd - 2007
Evenement	7th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2007) - Bremen, Duitsland Duur: 20 mei 2007 → 24 mei 2007 Congresnummer: 7

Congres

Congres	7th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2007)
Verkorte titel	EUSPEN 2007
Land/Regio	Duitsland
Stad	Bremen
Periode	20/05/07 → 24/05/07
Ander	EUSPEN 2007

Citeer dit

@inproceedings{f9315b63b20340e0afc515097678e488,

title = "Three generations of stage control and architecture",

author = "H. Butler",

year = "2007",

language = "English",

pages = "153--156",

booktitle = "Proceedings of the 7th Conference of the European sociaty for Precision Engineering and Nanotechnology (EUSPEN 2007), May 20th - May 24th 2007, Bremen, Germany",

note = "7th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2007), EUSPEN 2007 ; Conference date: 20-05-2007 Through 24-05-2007",

}

Butler, H 2007, Three generations of stage control and architecture. in Proceedings of the 7th Conference of the European sociaty for Precision Engineering and Nanotechnology (EUSPEN 2007), May 20th - May 24th 2007, Bremen, Germany. Bremen, Germany, blz. 153-156, 7th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2007), Bremen, Duitsland, 20/05/07.

Three generations of stage control and architecture. / Butler, H.

Proceedings of the 7th Conference of the European sociaty for Precision Engineering and Nanotechnology (EUSPEN 2007), May 20th - May 24th 2007, Bremen, Germany. Bremen, Germany, 2007. blz. 153-156.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

TY - GEN

T1 - Three generations of stage control and architecture

AU - Butler, H.

N1 - Conference code: 7

PY - 2007

Y1 - 2007

M3 - Conference contribution

SP - 153

EP - 156

BT - Proceedings of the 7th Conference of the European sociaty for Precision Engineering and Nanotechnology (EUSPEN 2007), May 20th - May 24th 2007, Bremen, Germany

CY - Bremen, Germany

T2 - 7th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2007)

Y2 - 20 May 2007 through 24 May 2007

ER -