Thermally induced deformations in electron microscopy: challenges and opportunities for system identification

Enzo Evers, Ronald Lamers, Tom Oomen

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Samenvatting

Thermal effects are becoming increasingly important in efforts to enhance the
performance of electron microscopes. Therefore, accurate thermal-mechanical
models are desired for analysis and control. Modelling thermal systems from
experimental data, i.e. system identification, is challenging due to large
transients, large time scales, excitation signal limitations, large environmental
disturbances, and nonlinear behaviour. An identification framework has been
developed to address these issues. The presented approach facilitates the
implementation of advanced control techniques and error compensation
strategies by providing high-fidelity models.
Originele taal-2Engels
Artikelnummer2
Pagina's (van-tot)12-18
Aantal pagina's6
TijdschriftMikroniek
Nummer van het tijdschrift2
StatusGepubliceerd - apr 2019

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