Originele taal-2 | Engels |
---|---|
Titel | Proceedings of the 9th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE 2008), Germany, Freiburg |
Pagina's | 199-203 |
Status | Gepubliceerd - 2008 |
The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film
C.A. Yuan, A.E. Flower, O. Sluis, van der, G.Q. Zhang, L.J. Ernst, M. Cherkaoui, W.D. Driel, van
Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review