The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film

C.A. Yuan, A.E. Flower, O. Sluis, van der, G.Q. Zhang, L.J. Ernst, M. Cherkaoui, W.D. Driel, van

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Originele taal-2Engels
TitelProceedings of the 9th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE 2008), Germany, Freiburg
Pagina's199-203
StatusGepubliceerd - 2008

Citeer dit