The business of fast ALD equipment for depositing alumina passivation layers on crystalline silicon solar cells

Ad Vermeer, Roger Gortzen, P. Poodt, F. Roozeboom

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Samenvatting

Atomic Layer Deposition (ALD) is a gas phase deposition technique for depositing very high quality thin films with an unsurpassed conformality. The main drawback of ALD however is the very low deposition rate (∼ 1 nm/min). Recently, record deposition rates for alumina of up to 1 nm/s were reached using spatial ALD, while maintaining the typical assets regarding film quality as obtained by conventional, slow ALD [1]. This allows for ALD at high throughput numbers. One interesting application is passivation of crystalline silicon solar cells. Applying a thin alumina layer is reported to increase solar cell efficiency and enables the use of thinner wafers, thus reducing the main cost factor [2]. In this paper we report on the latest progress made by SoLayTec that delivered a working prototype of a system realizing full area single sided deposition of alumina on 156 × 156 mm 2, mono- and multi crystalline silicon wafers for solar cell applications. The alumina layers showed excellent passivation. Based on this concept, a high-throughput ALD deposition tool is being developed targeting throughput numbers of up to 3000 wafers/hr. Finally, we report on the process of commercializing this technology.

Originele taal-2Engels
TitelThe Business of Nanotechnology III
Plaats van productieWarrendale
UitgeverijMaterials Research Society
Pagina's61-67
Aantal pagina's7
ISBN van geprinte versie9781618395559
DOI's
StatusGepubliceerd - 1 dec 2011
Evenement2011 Materials Research Society Spring Meeting - San Francisco, CA, Verenigde Staten van Amerika
Duur: 25 apr 201129 apr 2011

Publicatie series

NaamMaterials Research Society symposium proceedings
Volume1353
ISSN van geprinte versie0272-9172

Congres

Congres2011 Materials Research Society Spring Meeting
Land/RegioVerenigde Staten van Amerika
StadSan Francisco, CA
Periode25/04/1129/04/11

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