TALIF on ozone in a DC glow discharge for oxidation of ultrathin aluminum layers

C.A.M. Knechten, R.A.H. Engeln, H.J.M. Swagten, B. Koopmans, W.J.M. Jonge, de, M.C.M. Sanden, van de

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademic

Originele taal-2Engels
TitelProceedings of the 16th International Vacuum Congress (IVC-16) and the 8th International Conference on Nano-meter Scale Science & Technology, 28 June-2 July 2004, Venice, Italy
Pagina'sPS-MoA2-
StatusGepubliceerd - 2004
Evenementconference; 16th International Vacuum Congress (IVC-16) / 8th International Conference on Nano-meter Scale Science & Technology; 2004-06-28; 2004-07-02 -
Duur: 28 jun 20042 jul 2004

Congres

Congresconference; 16th International Vacuum Congress (IVC-16) / 8th International Conference on Nano-meter Scale Science & Technology; 2004-06-28; 2004-07-02
Periode28/06/042/07/04
Ander16th International Vacuum Congress (IVC-16) / 8th International Conference on Nano-meter Scale Science & Technology

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