Systematic numerical modelling of industrial plasma using PLASIMO

J. Dijk, van; W.J.M. Brok; B.H.P. Broks; A. Hartgers; M.J. Donker, van den; M.L. Beks; J.J.A.M. Mullen, van der

Systematic numerical modelling of industrial plasma using PLASIMO

J. Dijk, van, W.J.M. Brok, B.H.P. Broks, A. Hartgers, M.J. Donker, van den, M.L. Beks, J.J.A.M. Mullen, van der

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic

Samenvatting

In recent years the plasma simulation model Plasimo (http://plasimo.phys.tue.nl), has been developed at Eindhoven University of Technology. Initially intended as a program dedicated to the modelling of thermal argon ICP's, it has developed into a fully-fledged code capable of handling a variety of equilibrium and non-equilibrium plasmas. In this contribution we shall give an overview of the design and capabilities of Plasimo, and discuss the plasma sources to which it has been applied. A demonstration will be given of the application of Plasimo to light sources. We conclude with a discussion of present and future plans

Originele taal-2	Engels
Titel	Proceedings of the High Technology Plasma Processes (HTTP9), 27 March-4 June, 2006, Saint-Petersburg, Russia
Pagina's	NLii3-
Status	Gepubliceerd - 2006
Evenement	High Technology Plasma Processes (HTTP9) - Saint-Petersburg, Rusland Duur: 27 mei 2006 → 4 jun. 2006

Congres

Congres	High Technology Plasma Processes (HTTP9)
Verkorte titel	HTTP9
Land/Regio	Rusland
Stad	Saint-Petersburg
Periode	27/05/06 → 4/06/06

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title = "Systematic numerical modelling of industrial plasma using PLASIMO",

abstract = "In recent years the plasma simulation model Plasimo (http://plasimo.phys.tue.nl), has been developed at Eindhoven University of Technology. Initially intended as a program dedicated to the modelling of thermal argon ICP's, it has developed into a fully-fledged code capable of handling a variety of equilibrium and non-equilibrium plasmas. In this contribution we shall give an overview of the design and capabilities of Plasimo, and discuss the plasma sources to which it has been applied. A demonstration will be given of the application of Plasimo to light sources. We conclude with a discussion of present and future plans",

author = "{Dijk, van}, J. and W.J.M. Brok and B.H.P. Broks and A. Hartgers and {Donker, van den}, M.J. and M.L. Beks and {Mullen, van der}, J.J.A.M.",

year = "2006",

language = "English",

pages = "NLii3--",

booktitle = "Proceedings of the High Technology Plasma Processes (HTTP9), 27 March-4 June, 2006, Saint-Petersburg, Russia",

note = "High Technology Plasma Processes (HTTP9), HTTP9 ; Conference date: 27-05-2006 Through 04-06-2006",

}

Dijk, van, J, Brok, WJM, Broks, BHP, Hartgers, A, Donker, van den, MJ, Beks, ML & Mullen, van der, JJAM 2006, Systematic numerical modelling of industrial plasma using PLASIMO. in Proceedings of the High Technology Plasma Processes (HTTP9), 27 March-4 June, 2006, Saint-Petersburg, Russia. blz. NLii3-, High Technology Plasma Processes (HTTP9), Saint-Petersburg, Rusland, 27/05/06.

TY - GEN

T1 - Systematic numerical modelling of industrial plasma using PLASIMO

AU - Dijk, van, J.

AU - Brok, W.J.M.

AU - Broks, B.H.P.

AU - Hartgers, A.

AU - Donker, van den, M.J.

AU - Beks, M.L.

AU - Mullen, van der, J.J.A.M.

PY - 2006

Y1 - 2006

N2 - In recent years the plasma simulation model Plasimo (http://plasimo.phys.tue.nl), has been developed at Eindhoven University of Technology. Initially intended as a program dedicated to the modelling of thermal argon ICP's, it has developed into a fully-fledged code capable of handling a variety of equilibrium and non-equilibrium plasmas. In this contribution we shall give an overview of the design and capabilities of Plasimo, and discuss the plasma sources to which it has been applied. A demonstration will be given of the application of Plasimo to light sources. We conclude with a discussion of present and future plans

AB - In recent years the plasma simulation model Plasimo (http://plasimo.phys.tue.nl), has been developed at Eindhoven University of Technology. Initially intended as a program dedicated to the modelling of thermal argon ICP's, it has developed into a fully-fledged code capable of handling a variety of equilibrium and non-equilibrium plasmas. In this contribution we shall give an overview of the design and capabilities of Plasimo, and discuss the plasma sources to which it has been applied. A demonstration will be given of the application of Plasimo to light sources. We conclude with a discussion of present and future plans

M3 - Conference contribution

SP - NLii3-

BT - Proceedings of the High Technology Plasma Processes (HTTP9), 27 March-4 June, 2006, Saint-Petersburg, Russia

T2 - High Technology Plasma Processes (HTTP9)

Y2 - 27 May 2006 through 4 June 2006

ER -

Systematic numerical modelling of industrial plasma using PLASIMO

Samenvatting

Congres

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