Samenvatting
The high vertical index contrast and the small thickness of thin InP-based membrane structures bonded with BCB on Silicon allow the realization of very small devices. To make photonic integrated circuits with both passive and active components in these membranes, active-passive integration on a small scale is essential. In this paper we will present our results on sub-micrometer active areas for membrane applications.
Originele taal-2 | Engels |
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Titel | Proceedings of the 15th European Conference on Integrated Optics, ECIO10, April 06-09, Cambridge, United Kingdom |
Redacteuren | I. White, R. Penty |
Plaats van productie | London |
Uitgeverij | Institution of Engineering and Technology |
Pagina's | ThH1-1/2 |
Status | Gepubliceerd - 2010 |