Sputtering hollow cathode discharge: modelling study and comparison with experiments

D.B. Mihailova; M. Grozeva; J. Dijk, van; W.J.M. Brok; J.J.A.M. Mullen, van der

Sputtering hollow cathode discharge: modelling study and comparison with experiments

D.B. Mihailova
, M. Grozeva
, J. Dijk, van
, W.J.M. Brok
, J.J.A.M. Mullen, van der

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic

Originele taal-2	Engels
Titel	Proceedings of the 10th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-10 2007), 15-16 November 2007, Kerkrade, The Netherlands
Status	Gepubliceerd - 2007

Citeer dit

@inproceedings{bbe310736a104d309dcd376536be9044,

title = "Sputtering hollow cathode discharge: modelling study and comparison with experiments",

author = "D.B. Mihailova and M. Grozeva and \{Dijk, van\}, J. and W.J.M. Brok and \{Mullen, van der\}, J.J.A.M.",

year = "2007",

language = "English",

booktitle = "Proceedings of the 10th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-10 2007), 15-16 November 2007, Kerkrade, The Netherlands",

}

Sputtering hollow cathode discharge: modelling study and comparison with experiments. / Mihailova, D.B.; Grozeva, M.; Dijk, van, J. et al.
Proceedings of the 10th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-10 2007), 15-16 November 2007, Kerkrade, The Netherlands. 2007.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic

TY - GEN

T1 - Sputtering hollow cathode discharge: modelling study and comparison with experiments

AU - Mihailova, D.B.

AU - Grozeva, M.

AU - Dijk, van, J.

AU - Brok, W.J.M.

AU - Mullen, van der, J.J.A.M.

PY - 2007

Y1 - 2007

M3 - Conference contribution

BT - Proceedings of the 10th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-10 2007), 15-16 November 2007, Kerkrade, The Netherlands

ER -