Solutions to multiple probing challenges for test access to multi-die stacked integrated circuits

Multi-die stacked ICs are getting increasing traction in the market, fueled by innovations in wafer processing technologies (e.g., vertical inter-die and intra-die connections), stack assembly, and advanced packaging approaches (e.g., wafer-level packaging). Given the non-perfect nature of their manufacturing processes, these stacked ICs (SICs) need all to be individually tested for manufacturing defects in an effective, yet efficient manner. This paper discusses a handful of probing challenges specific to such SICs and their solutions: probing ultra-thin wafers on a flexible tape on extra-large tape frames, probing on large arrays of dense micro-bumps, analyzing probe-to-pad alignment (PTPA) accuracy contributions from probe station and probe card on the basis of probe mark images, and efficient auto-correction of individual misalignments of singulated dies or die stacks on tape. The paper concludes with a real-life case study, in which most of the discussed challenges and solutions are combined.