Software reliability qualification for semi-conductor manufacturing systems

The length of the reliability qualification test for a new software release at ASML is determined using the SEMI-E10 standard. A system level `run production' test case is used for qualification. Specific sub-system test cases could reach the confidence target faster. However, the normal approach from the reliability engineering domain to utilize the sub-system test cases is much more involved. This paper presents a simple and intuitive reliability qualification method which benefits from specific test cases and the ability to deal with failed test cases. Two case studies have been performed which how the applicability for software reliability qualification.