Shining a light on silicon etching

A.A.E. Stevens

Onderzoeksoutput: Scriptie › Dissertatie 1 (Onderzoek TU/e / Promotie TU/e)

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Originele taal-2	Engels
Kwalificatie	Doctor in de Filosofie
Toekennende instantie	Applied Physics and Science Education
Begeleider(s)/adviseur	Beijerinck, Herman, Promotor van de Sanden, M.C.M. (Richard), Promotor Kessels, W.M.M. (Erwin), Co-Promotor
Datum van toekenning	29 jun. 2006
Plaats van publicatie	Eindhoven
Uitgever	Technische Universiteit Eindhoven
Gedrukte ISBN's	978-90-386-2491-4
DOI's	https://doi.org/10.6100/IR609424
Status	Gepubliceerd - 2006

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@phdthesis{c3120726203144c1b6d7384a619b7c1a,

title = "Shining a light on silicon etching",

author = "A.A.E. Stevens",

year = "2006",

doi = "10.6100/IR609424",

language = "English",

isbn = "978-90-386-2491-4",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}