Scalable reticle heating correction design

With the increasing complexity of ASML machines, the Metrology department has developed many measurement and correction mechanisms for improving the exposure accuracy. One of such mechanisms is reticle heating correction. This project provided design and implementation for reticle heating correction by following the 4+1 view model. As a result, a software framework was delivered, including the data model of reticle heating correction. With this software framework, reticle heating correction can be easily extended, for example by adding and removing reticle heating correction models. In addition, it demonstrated that the software framework does not introduce negative overlay impact.