Role of electron–ion dissociative recombination in CH 4 microwave plasma on basis of simulations and measurements of electron energy

T. Minea (Corresponding author), A.W. van de Steeg, B. Wolf, A.S. da Silva, F.J.J. Peeters, D.C.M. van den Bekerom, T. Butterworth, Q. Ong, M.C.M. van de Sanden, G.J. van Rooij

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

Uittreksel

C–H bond activation was studied in low pressure microwave plasma discharges in methane. Electron energy loss channels were analyzed in view of promoting vibrational excitation. The molecular dissociative recombination (DR) channel is concluded to play multiple roles in the hydrocarbon plasma chemistry. DR increases the electron temperature with input power density and simultaneously breaks the hydrocarbon chains. Depending on the ionic species considered, plasma density n e in the range of 1017-1019m-3 (10 - 6- 10 - 4 ionization degree) and the electron mean energy < Te> in the range of 2-4eV were estimated on basis of a Boltzman solver. < Te> from 2-3eV measured with Thomson scattering anchored the microwave discharges in a preferential regime for vibrational excitation. The best agreement with experiments was obtained when C + is the dominant ion in the CH 4 microwave plasma, formed through successive DR and charge exchange reactions from molecular ions.

TaalEngels
Pagina's1275-1289
TijdschriftPlasma Chemistry and Plasma Processing
Volume35
Nummer van het tijdschrift5
Vroegere onlinedatum24 jun 2019
DOI's
StatusGepubliceerd - 1 sep 2019

Vingerafdruk

electron-ion recombination
Microwaves
electron energy
methylidyne
Ions
Hydrocarbons
Plasmas
microwaves
Electrons
hydrocarbons
plasma chemistry
simulation
Thomson scattering
Plasma density
Electron temperature
Methane
molecular ions
charge exchange
plasma jets
plasma density

Trefwoorden

    Citeer dit

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    title = "Role of electron–ion dissociative recombination in CH 4 microwave plasma on basis of simulations and measurements of electron energy",
    abstract = "C–H bond activation was studied in low pressure microwave plasma discharges in methane. Electron energy loss channels were analyzed in view of promoting vibrational excitation. The molecular dissociative recombination (DR) channel is concluded to play multiple roles in the hydrocarbon plasma chemistry. DR increases the electron temperature with input power density and simultaneously breaks the hydrocarbon chains. Depending on the ionic species considered, plasma density n e in the range of 1017-1019m-3 (10 - 6- 10 - 4 ionization degree) and the electron mean energy < Te> in the range of 2-4eV were estimated on basis of a Boltzman solver. < Te> from 2-3eV measured with Thomson scattering anchored the microwave discharges in a preferential regime for vibrational excitation. The best agreement with experiments was obtained when C + is the dominant ion in the CH 4 microwave plasma, formed through successive DR and charge exchange reactions from molecular ions.",
    keywords = "Activation, Methane, Plasma, Scattering, Thomson",
    author = "T. Minea and {van de Steeg}, A.W. and B. Wolf and {da Silva}, A.S. and F.J.J. Peeters and {van den Bekerom}, D.C.M. and T. Butterworth and Q. Ong and {van de Sanden}, M.C.M. and {van Rooij}, G.J.",
    year = "2019",
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    language = "English",
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    publisher = "Springer",
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    }

    Role of electron–ion dissociative recombination in CH 4 microwave plasma on basis of simulations and measurements of electron energy. / Minea, T. (Corresponding author); van de Steeg, A.W.; Wolf, B.; da Silva, A.S.; Peeters, F.J.J.; van den Bekerom, D.C.M.; Butterworth, T.; Ong, Q.; van de Sanden, M.C.M.; van Rooij, G.J.

    In: Plasma Chemistry and Plasma Processing, Vol. 35, Nr. 5, 01.09.2019, blz. 1275-1289.

    Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

    TY - JOUR

    T1 - Role of electron–ion dissociative recombination in CH 4 microwave plasma on basis of simulations and measurements of electron energy

    AU - Minea,T.

    AU - van de Steeg,A.W.

    AU - Wolf,B.

    AU - da Silva,A.S.

    AU - Peeters,F.J.J.

    AU - van den Bekerom,D.C.M.

    AU - Butterworth,T.

    AU - Ong,Q.

    AU - van de Sanden,M.C.M.

    AU - van Rooij,G.J.

    PY - 2019/9/1

    Y1 - 2019/9/1

    N2 - C–H bond activation was studied in low pressure microwave plasma discharges in methane. Electron energy loss channels were analyzed in view of promoting vibrational excitation. The molecular dissociative recombination (DR) channel is concluded to play multiple roles in the hydrocarbon plasma chemistry. DR increases the electron temperature with input power density and simultaneously breaks the hydrocarbon chains. Depending on the ionic species considered, plasma density n e in the range of 1017-1019m-3 (10 - 6- 10 - 4 ionization degree) and the electron mean energy < Te> in the range of 2-4eV were estimated on basis of a Boltzman solver. < Te> from 2-3eV measured with Thomson scattering anchored the microwave discharges in a preferential regime for vibrational excitation. The best agreement with experiments was obtained when C + is the dominant ion in the CH 4 microwave plasma, formed through successive DR and charge exchange reactions from molecular ions.

    AB - C–H bond activation was studied in low pressure microwave plasma discharges in methane. Electron energy loss channels were analyzed in view of promoting vibrational excitation. The molecular dissociative recombination (DR) channel is concluded to play multiple roles in the hydrocarbon plasma chemistry. DR increases the electron temperature with input power density and simultaneously breaks the hydrocarbon chains. Depending on the ionic species considered, plasma density n e in the range of 1017-1019m-3 (10 - 6- 10 - 4 ionization degree) and the electron mean energy < Te> in the range of 2-4eV were estimated on basis of a Boltzman solver. < Te> from 2-3eV measured with Thomson scattering anchored the microwave discharges in a preferential regime for vibrational excitation. The best agreement with experiments was obtained when C + is the dominant ion in the CH 4 microwave plasma, formed through successive DR and charge exchange reactions from molecular ions.

    KW - Activation

    KW - Methane

    KW - Plasma

    KW - Scattering

    KW - Thomson

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    SN - 0272-4324

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