Resemblance in gas composition of Ar–N2–O2 plasmas and Ar–NO plasmas

J.H. Helden, van, R.A.B. Zijlmans, D.C. Schram, R.A.H. Engeln

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

10 Citaties (Scopus)

Uittreksel

mixtures and Ar–NO mixtures with quantitative mass spectrometry. In the former, mainly N2 and O2, but also a significant amount of nitric oxide (NO) was formed, i.e. up to 5% of the background gas was NO. In the inverse experiment, in which NO was admixed to an argon plasma, up to 92% of the NO was converted into N2 and O2. The observed molecules are mostly generated in wall association processes but also by gas phase reactions between N atoms and O2 molecules leading to NO. The two types of plasmas show a strong mutual resemblance in the steady-state gas composition if substantial dissociation can be reached in the residence time of the gases in the plasma, i.e. 5% NO and 95% N2 and O2, although the starting conditions are completely different. It seems that in first order the system prefers to produce the most thermodynamically stable molecules.
Originele taal-2Engels
Pagina's (van-tot)025020-1/11
Aantal pagina's11
TijdschriftPlasma Sources Science and Technology
Volume18
Nummer van het tijdschrift2
DOI's
StatusGepubliceerd - 2009

Vingerafdruk

gas composition
nitric oxide
molecules
argon plasma
gases
mass spectroscopy
dissociation
vapor phases
atoms

Citeer dit

@article{4aacac7ae5574b34b67afb10a83e5a6a,
title = "Resemblance in gas composition of Ar–N2–O2 plasmas and Ar–NO plasmas",
abstract = "mixtures and Ar–NO mixtures with quantitative mass spectrometry. In the former, mainly N2 and O2, but also a significant amount of nitric oxide (NO) was formed, i.e. up to 5{\%} of the background gas was NO. In the inverse experiment, in which NO was admixed to an argon plasma, up to 92{\%} of the NO was converted into N2 and O2. The observed molecules are mostly generated in wall association processes but also by gas phase reactions between N atoms and O2 molecules leading to NO. The two types of plasmas show a strong mutual resemblance in the steady-state gas composition if substantial dissociation can be reached in the residence time of the gases in the plasma, i.e. 5{\%} NO and 95{\%} N2 and O2, although the starting conditions are completely different. It seems that in first order the system prefers to produce the most thermodynamically stable molecules.",
author = "{Helden, van}, J.H. and R.A.B. Zijlmans and D.C. Schram and R.A.H. Engeln",
year = "2009",
doi = "10.1088/0963-0252/18/2/025020",
language = "English",
volume = "18",
pages = "025020--1/11",
journal = "Plasma Sources Science and Technology",
issn = "0963-0252",
publisher = "Institute of Physics",
number = "2",

}

Resemblance in gas composition of Ar–N2–O2 plasmas and Ar–NO plasmas. / Helden, van, J.H.; Zijlmans, R.A.B.; Schram, D.C.; Engeln, R.A.H.

In: Plasma Sources Science and Technology, Vol. 18, Nr. 2, 2009, blz. 025020-1/11.

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

TY - JOUR

T1 - Resemblance in gas composition of Ar–N2–O2 plasmas and Ar–NO plasmas

AU - Helden, van, J.H.

AU - Zijlmans, R.A.B.

AU - Schram, D.C.

AU - Engeln, R.A.H.

PY - 2009

Y1 - 2009

N2 - mixtures and Ar–NO mixtures with quantitative mass spectrometry. In the former, mainly N2 and O2, but also a significant amount of nitric oxide (NO) was formed, i.e. up to 5% of the background gas was NO. In the inverse experiment, in which NO was admixed to an argon plasma, up to 92% of the NO was converted into N2 and O2. The observed molecules are mostly generated in wall association processes but also by gas phase reactions between N atoms and O2 molecules leading to NO. The two types of plasmas show a strong mutual resemblance in the steady-state gas composition if substantial dissociation can be reached in the residence time of the gases in the plasma, i.e. 5% NO and 95% N2 and O2, although the starting conditions are completely different. It seems that in first order the system prefers to produce the most thermodynamically stable molecules.

AB - mixtures and Ar–NO mixtures with quantitative mass spectrometry. In the former, mainly N2 and O2, but also a significant amount of nitric oxide (NO) was formed, i.e. up to 5% of the background gas was NO. In the inverse experiment, in which NO was admixed to an argon plasma, up to 92% of the NO was converted into N2 and O2. The observed molecules are mostly generated in wall association processes but also by gas phase reactions between N atoms and O2 molecules leading to NO. The two types of plasmas show a strong mutual resemblance in the steady-state gas composition if substantial dissociation can be reached in the residence time of the gases in the plasma, i.e. 5% NO and 95% N2 and O2, although the starting conditions are completely different. It seems that in first order the system prefers to produce the most thermodynamically stable molecules.

U2 - 10.1088/0963-0252/18/2/025020

DO - 10.1088/0963-0252/18/2/025020

M3 - Article

VL - 18

SP - 025020-1/11

JO - Plasma Sources Science and Technology

JF - Plasma Sources Science and Technology

SN - 0963-0252

IS - 2

ER -