Remote plasma deposition of inorganic films : the influence of plasma chemistry and ion bombardment on film growth and moisture permeation barrier performances

M. Creatore, M.A. Blauw, J.L. Hemmen, van, I. Volintiru, M.M. Koetse, V.I.T.A. Lohmann, M.C.M. Sanden, van de, A. Milella, H.F.M. Schoo

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

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Originele taal-2Engels
TitelProceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts)
Plaats van productieS.l.
Uitgeverijs.n.
Pagina's277-277
StatusGepubliceerd - 2006
Evenementconference; Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany - Garmisch-Partenkirchen, Duitsland
Duur: 10 sep. 200615 sep. 2006

Congres

Congresconference; Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany
Verkorte titelPSE 2006
Land/RegioDuitsland
StadGarmisch-Partenkirchen
Periode10/09/0615/09/06
Ander10th International Conference on Plasma Surface Engineering

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