Real-time study of HWCVD a-Si:H film growth using spectroscopic second harmonic generation

W.M.M. Kessels; I.M.P. Aarts; J.J.H. Gielis; P.M.J. Grauls; C.M. Leewis; M.C.M. Sanden, van de

Real-time study of HWCVD a-Si:H film growth using spectroscopic second harmonic generation

W.M.M. Kessels, I.M.P. Aarts, J.J.H. Gielis, P.M.J. Grauls, C.M. Leewis, M.C.M. Sanden, van de

Plasma & Materials Processing

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

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Originele taal-2	Engels
Titel	3rd international conference on hot-wire CVD (Cat-CVD) process : August 23-27, 2004, Utrecht, The Netherlands : extended abstracts
Plaats van productie	S.n.
Uitgeverij	s.n.
Pagina's	247-250
Status	Gepubliceerd - 2004

Citeer dit

Kessels, W. M. M., Aarts, I. M. P., Gielis, J. J. H., Grauls, P. M. J., Leewis, C. M., & Sanden, van de, M. C. M. (2004). Real-time study of HWCVD a-Si:H film growth using spectroscopic second harmonic generation. In 3rd international conference on hot-wire CVD (Cat-CVD) process : August 23-27, 2004, Utrecht, The Netherlands : extended abstracts (blz. 247-250). s.n..

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title = "Real-time study of HWCVD a-Si:H film growth using spectroscopic second harmonic generation",

author = "W.M.M. Kessels and I.M.P. Aarts and J.J.H. Gielis and P.M.J. Grauls and C.M. Leewis and {Sanden, van de}, M.C.M.",

year = "2004",

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Real-time study of HWCVD a-Si:H film growth using spectroscopic second harmonic generation. / Kessels, W.M.M.; Aarts, I.M.P.; Gielis, J.J.H.; Grauls, P.M.J.; Leewis, C.M.; Sanden, van de, M.C.M.

3rd international conference on hot-wire CVD (Cat-CVD) process : August 23-27, 2004, Utrecht, The Netherlands : extended abstracts. S.n. : s.n., 2004. blz. 247-250.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

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AU - Sanden, van de, M.C.M.

PY - 2004

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