Rapid thermal processing systems: oerview of capabilities and limitations

Fred Roozeboom

doi:10.1109/ICSMC.1993.384841

Rapid thermal processing systems: oerview of capabilities and limitations

Fred Roozeboom

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

Samenvatting

This paper reviews the current status, problems and options in RTP system and process design. Some commercial systems will be discussed along with some improvements that can still be made in temperature reproducibility, process control and yield. This includes some recent developments in temperature reproducibility by compensated emissivity control.

Originele taal-2	Engels
Titel	Proceedings of the IEEE International Conference on Systems, Man and Cybernetics
Plaats van productie	Piscataway
Uitgeverij	Institute of Electrical and Electronics Engineers
Pagina's	1-6
Aantal pagina's	6
Volume	2
ISBN van geprinte versie	0780309111
DOI's	https://doi.org/10.1109/ICSMC.1993.384841
Status	Gepubliceerd - 1 dec. 1993
Extern gepubliceerd	Ja
Evenement	Systems, Man and Cybernetics, 1993. International Conference on Systems Engineering in the Service of Human. 17 -20 Oct 1993, Le Touquet - Le Touquet, Frankrijk Duur: 17 okt. 1993 → 20 okt. 1993

Congres

Congres	Systems, Man and Cybernetics, 1993. International Conference on Systems Engineering in the Service of Human. 17 -20 Oct 1993, Le Touquet
Verkorte titel	SMC 1993
Land/Regio	Frankrijk
Stad	Le Touquet
Periode	17/10/93 → 20/10/93

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@inproceedings{ad9c5d2cebdb4431890930493361e3d5,

title = "Rapid thermal processing systems: oerview of capabilities and limitations",

abstract = "This paper reviews the current status, problems and options in RTP system and process design. Some commercial systems will be discussed along with some improvements that can still be made in temperature reproducibility, process control and yield. This includes some recent developments in temperature reproducibility by compensated emissivity control.",

author = "Fred Roozeboom",

year = "1993",

month = dec,

day = "1",

doi = "10.1109/ICSMC.1993.384841",

language = "English",

isbn = "0780309111",

volume = "2",

pages = "1--6",

booktitle = "Proceedings of the IEEE International Conference on Systems, Man and Cybernetics",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

note = "1993 IEEE International Conference on Systems, Man and Cybernetics, SMC 1993, SMC 1993 ; Conference date: 17-10-1993 Through 20-10-1993",

}

Roozeboom, F 1993, Rapid thermal processing systems: oerview of capabilities and limitations. in Proceedings of the IEEE International Conference on Systems, Man and Cybernetics. vol. 2, Institute of Electrical and Electronics Engineers, Piscataway, blz. 1-6, Systems, Man and Cybernetics, 1993. International Conference on Systems Engineering in the Service of Human. 17 -20 Oct 1993, Le Touquet, Le Touquet, Frankrijk, 17/10/93. https://doi.org/10.1109/ICSMC.1993.384841

Rapid thermal processing systems: oerview of capabilities and limitations. / Roozeboom, Fred.
Proceedings of the IEEE International Conference on Systems, Man and Cybernetics. Vol. 2 Piscataway: Institute of Electrical and Electronics Engineers, 1993. blz. 1-6.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

TY - GEN

T1 - Rapid thermal processing systems

T2 - 1993 IEEE International Conference on Systems, Man and Cybernetics, SMC 1993

AU - Roozeboom, Fred

PY - 1993/12/1

Y1 - 1993/12/1

N2 - This paper reviews the current status, problems and options in RTP system and process design. Some commercial systems will be discussed along with some improvements that can still be made in temperature reproducibility, process control and yield. This includes some recent developments in temperature reproducibility by compensated emissivity control.

AB - This paper reviews the current status, problems and options in RTP system and process design. Some commercial systems will be discussed along with some improvements that can still be made in temperature reproducibility, process control and yield. This includes some recent developments in temperature reproducibility by compensated emissivity control.

UR - http://www.scopus.com/inward/record.url?scp=0027883363&partnerID=8YFLogxK

U2 - 10.1109/ICSMC.1993.384841

DO - 10.1109/ICSMC.1993.384841

M3 - Conference contribution

AN - SCOPUS:0027883363

SN - 0780309111

VL - 2

SP - 1

EP - 6

BT - Proceedings of the IEEE International Conference on Systems, Man and Cybernetics

PB - Institute of Electrical and Electronics Engineers

CY - Piscataway

Y2 - 17 October 1993 through 20 October 1993

ER -

Rapid thermal processing systems: oerview of capabilities and limitations

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Congres

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