Pulsed power source for in-situ plasma cleaning application

Roberto Garcia Rochin

Onderzoeksoutput: Scriptie › EngD Thesis

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Originele taal-2	Engels
Begeleider(s)/adviseur	Huiskamp, Tom, Begeleider Blom, Paul P.M., Begeleider
Plaats van publicatie	Eindhoven
Uitgever	Technische Universiteit Eindhoven
Status	Gepubliceerd - 1 nov. 2022

EngD thesis. - Confidential until 1-11-2026

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@phdthesis{f331868f6de6454a8baefea5330e2bc9,

title = "Pulsed power source for in-situ plasma cleaning application",

author = "{Garcia Rochin}, Roberto",

note = "EngD thesis. - Confidential until 1-11-2026",

year = "2022",

month = nov,

day = "1",

language = "English",

series = "EngD Thesis",

publisher = "Technische Universiteit Eindhoven",

type = "EngD Thesis",

}