Progress in reactive ion etching of epitaxial GaN

F. Karouta, P. Vreugdewater, B. Jacobs, B.H. Roy, van, O. Schön, H. Protzmann, M. Heuken

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Originele taal-2Engels
TitelProc. Conference on Optoelectronics and Microelectronics Materials and Devices (COMMAD)
Pagina's171-174
StatusGepubliceerd - 1999
Evenement1999 Conference on Optoelectronics and Microelectronic Materials and Devices (COMMAD 1999) - Perth, Australië
Duur: 14 dec 199916 dec 1999

Congres

Congres1999 Conference on Optoelectronics and Microelectronic Materials and Devices (COMMAD 1999)
Land/RegioAustralië
StadPerth
Periode14/12/9916/12/99
AnderConference on Optoelectronics and Microelectronics Materials and Devices (COMMAD), Perth, Australia, 14-16 December

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