Processing induced defects in submicron active-passive areas for InP-based membranes on silicon (IMOS)
- R. Zhang
- , J.J.G.M. Tol, van der
- , P.J.A. Thijs
- , M.K. Smit
Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic
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