Probing the electron energy distribution function (EEDF) of ionizing plasmas

E.A.D. Carbone; S. Hubner; W.A.A.D. Graef; J. Dijk, van; G.M.W. Kroesen

Probing the electron energy distribution function (EEDF) of ionizing plasmas

E.A.D. Carbone, S. Hubner, W.A.A.D. Graef, J. Dijk, van, G.M.W. Kroesen

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Strong deviations from Maxwellian equilibrium of the electron energy distribution function (EEDF) are very often encountered in (relatively) high pressure, non-equilibrium plasmas. The shape of the EEDF will strong affect all electron induced excitation processes and consequently excited species net effluxes. In this contribution, we will present an experimental investigation of the EEDF of an intermediate pressure (argon) microwave plasma by a combination of experimental and modelling techniques.

Originele taal-2	Engels
Pagina's	1-3
Status	Gepubliceerd - 2013

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Proceedings of the 31st International Conference on Phenomena in Ionized Gases (ICPIG 2013), 14 - 19 July 2013, Granada, Spain

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title = "Probing the electron energy distribution function (EEDF) of ionizing plasmas",

abstract = "Strong deviations from Maxwellian equilibrium of the electron energy distribution function (EEDF) are very often encountered in (relatively) high pressure, non-equilibrium plasmas. The shape of the EEDF will strong affect all electron induced excitation processes and consequently excited species net effluxes. In this contribution, we will present an experimental investigation of the EEDF of an intermediate pressure (argon) microwave plasma by a combination of experimental and modelling techniques.",

author = "E.A.D. Carbone and S. Hubner and W.A.A.D. Graef and {Dijk, van}, J. and G.M.W. Kroesen",

note = "Proceedings of the 31st International Conference on Phenomena in Ionized Gases (ICPIG 2013), 14 - 19 July 2013, Granada, Spain",

year = "2013",

language = "English",

pages = "1--3",

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TY - CONF

T1 - Probing the electron energy distribution function (EEDF) of ionizing plasmas

AU - Carbone, E.A.D.

AU - Hubner, S.

AU - Graef, W.A.A.D.

AU - Dijk, van, J.

AU - Kroesen, G.M.W.

N1 - Proceedings of the 31st International Conference on Phenomena in Ionized Gases (ICPIG 2013), 14 - 19 July 2013, Granada, Spain

PY - 2013

Y1 - 2013

N2 - Strong deviations from Maxwellian equilibrium of the electron energy distribution function (EEDF) are very often encountered in (relatively) high pressure, non-equilibrium plasmas. The shape of the EEDF will strong affect all electron induced excitation processes and consequently excited species net effluxes. In this contribution, we will present an experimental investigation of the EEDF of an intermediate pressure (argon) microwave plasma by a combination of experimental and modelling techniques.

AB - Strong deviations from Maxwellian equilibrium of the electron energy distribution function (EEDF) are very often encountered in (relatively) high pressure, non-equilibrium plasmas. The shape of the EEDF will strong affect all electron induced excitation processes and consequently excited species net effluxes. In this contribution, we will present an experimental investigation of the EEDF of an intermediate pressure (argon) microwave plasma by a combination of experimental and modelling techniques.

M3 - Poster

SP - 1

EP - 3

ER -

Probing the electron energy distribution function (EEDF) of ionizing plasmas

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