Predictive-model-based MIMO motion control of an unstable 6-DoF hexapod stage for overlay measurements

G. Witvoet, S. Kuiper, G. Kramer, M. Baeten

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

2 Citaten (Scopus)
1 Downloads (Pure)

Samenvatting

Correct functionality of semiconductor devices depends on the overlay performance between device layers. Future smaller device features consequently require more accurate overlay metrology tools. In this paper we present a large dynamic range AFM overlay tool to directly measure marker-to-feature distances, and focus on the controller design of the large stroke 6-DoF hexapod motion stage which is at the heart of this tool. The stage is open-loop unstable due to magnetic gravity compensation, which calls for an initial model-based MIMO controller design, which is based on a finite-element modal analysis, geometric decoupling and SISO loopshaping. This controller is successfully validated in experiments; further controller improvements after closed-loop system identification yield a closed-loop position error of just 1 nm RMS.

Originele taal-2Engels
Titel1st Annual IEEE Conference on Control Technology and Applications, CCTA 2017
Plaats van productiePiscataway
UitgeverijInstitute of Electrical and Electronics Engineers
Pagina's726-731
Aantal pagina's6
Volume2017-January
ISBN van elektronische versie978-1-5090-2182-6
ISBN van geprinte versie978-1-5090-2183-3
DOI's
StatusGepubliceerd - aug 2017
Evenement1st IEEE Conference on Control Technology and Applications (CCTA 2017) - The Mauna Lani Bay Hotel and Bungalows, Kohala Coast, Verenigde Staten van Amerika
Duur: 27 aug 201730 aug 2017
Congresnummer: 1

Congres

Congres1st IEEE Conference on Control Technology and Applications (CCTA 2017)
Verkorte titelCCTA 2017
LandVerenigde Staten van Amerika
StadKohala Coast
Periode27/08/1730/08/17

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