Predicting the mean cycle time as a function of throughput and product mix for cluster tool workstations using EPT-based aggregate modeling

C.P.L. Veeger; L.F.P. Etman; J. Herk, van; J.E. Rooda

doi:10.1109/ASMC.2009.5155958

Predicting the mean cycle time as a function of throughput and product mix for cluster tool workstations using EPT-based aggregate modeling

C.P.L. Veeger, L.F.P. Etman, J. Herk, van, J.E. Rooda

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

2 Citaten (Scopus)

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Predicting the mean cycle time as a function of throughput and product mix is helpful in making the production planning for cluster tools. To predict the mean cycle time, detailed simulation models may be used. However, detailed models require much development time, and it may not be possible to estimate all model parameters. Instead of a detailed simulation model, we propose to use a so-calledaggregate model to predict the mean cycle time as a function of throughput and product mix. The aggregate model is a lumped-parameter representation of the queueing system. We estimate the parameters of the aggregate model from arrival and departure data using the Effective Process Time (EPT) concept. The proposedmethod is illustrated for a simulation test case and a Crolles2 cluster tool workstation. The method accurately predicts the mean cycle time in a region around the workstations' operational product mix.

Originele taal-2	Engels
Titel	Proceedings of the 20th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2009)
Plaats van productie	Germany, Berlin
Pagina's	80-85
DOI's	https://doi.org/10.1109/ASMC.2009.5155958
Status	Gepubliceerd - 2009
Evenement	20th Annual IEEE/SEMI Asvanced Semiconductor Manufacturing Conference (ASMC 2009) - Berlin, Duitsland Duur: 10 mei 2009 → 12 mei 2009 Congresnummer: 20

Congres

Congres	20th Annual IEEE/SEMI Asvanced Semiconductor Manufacturing Conference (ASMC 2009)
Verkorte titel	ASMC 2009
Land/Regio	Duitsland
Stad	Berlin
Periode	10/05/09 → 12/05/09
Ander	ASMC 2009, 20th Annual IEEE/SEMI Asvanced Semiconductor Manufacturing Conference, Berlin, Germany

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10.1109/ASMC.2009.5155958

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Veeger, C. P. L., Etman, L. F. P., Herk, van, J., & Rooda, J. E. (2009). Predicting the mean cycle time as a function of throughput and product mix for cluster tool workstations using EPT-based aggregate modeling. In Proceedings of the 20th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2009) (blz. 80-85). https://doi.org/10.1109/ASMC.2009.5155958

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title = "Predicting the mean cycle time as a function of throughput and product mix for cluster tool workstations using EPT-based aggregate modeling",

abstract = "Predicting the mean cycle time as a function of throughput and product mix is helpful in making the production planning for cluster tools. To predict the mean cycle time, detailed simulation models may be used. However, detailed models require much development time, and it may not be possible to estimate all model parameters. Instead of a detailed simulation model, we propose to use a so-calledaggregate model to predict the mean cycle time as a function of throughput and product mix. The aggregate model is a lumped-parameter representation of the queueing system. We estimate the parameters of the aggregate model from arrival and departure data using the Effective Process Time (EPT) concept. The proposedmethod is illustrated for a simulation test case and a Crolles2 cluster tool workstation. The method accurately predicts the mean cycle time in a region around the workstations' operational product mix.",

author = "C.P.L. Veeger and L.F.P. Etman and {Herk, van}, J. and J.E. Rooda",

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Veeger, CPL, Etman, LFP, Herk, van, J & Rooda, JE 2009, Predicting the mean cycle time as a function of throughput and product mix for cluster tool workstations using EPT-based aggregate modeling. in Proceedings of the 20th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2009). Germany, Berlin, blz. 80-85, 20th Annual IEEE/SEMI Asvanced Semiconductor Manufacturing Conference (ASMC 2009), Berlin, Duitsland, 10/05/09. https://doi.org/10.1109/ASMC.2009.5155958

Predicting the mean cycle time as a function of throughput and product mix for cluster tool workstations using EPT-based aggregate modeling. / Veeger, C.P.L.; Etman, L.F.P.; Herk, van, J. et al.
Proceedings of the 20th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2009). Germany, Berlin, 2009. blz. 80-85.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

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AU - Rooda, J.E.

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Predicting the mean cycle time as a function of throughput and product mix for cluster tool workstations using EPT-based aggregate modeling

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