Precision motion control : ILC and DOB : traineeship report

E.J.G.J. Kikken, M. Steinbuch, M. Tomizuka

Onderzoeksoutput: Boek/rapportRapportAcademic

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Samenvatting

In this report the work that has been done during a threemonth visit to theMechanical SystemControl Laboratory at University of California Berkeley has been described. This work was focused on the control of a single degree of freedom NIKON wafer scanner. This includes the use of various iterative learning controllers (ILC) and a disturbance observer (DOB) to increase the accuracy of the system.
Originele taal-2Engels
Plaats van productieEindhoven
UitgeverijEindhoven University of Technology
Aantal pagina's28
StatusGepubliceerd - 2011

Publicatie series

NaamCST
Volume2011.093

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