Samenvatting
In this report the work that has been done during a threemonth visit to theMechanical SystemControl
Laboratory at University of California Berkeley has been described.
This work was focused on the control of a single degree of freedom NIKON wafer scanner. This
includes the use of various iterative learning controllers (ILC) and a disturbance observer (DOB) to
increase the accuracy of the system.
Originele taal-2 | Engels |
---|---|
Plaats van productie | Eindhoven |
Uitgeverij | Eindhoven University of Technology |
Aantal pagina's | 28 |
Status | Gepubliceerd - 2011 |
Publicatie series
Naam | CST |
---|---|
Volume | 2011.093 |