Power Electronics for Plasma Processing: Enabling Energy-Efficient and Accurate Ion Energy Control for Semiconductor Manufacturing

Qihao Yu

Onderzoeksoutput: Scriptie › Dissertatie 1 (Onderzoek TU/e / Promotie TU/e)

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Originele taal-2	Engels
Kwalificatie	Doctor in de Filosofie
Toekennende instantie	Electrical Engineering
Begeleider(s)/adviseur	Wijnands, C.G.E. (Korneel), Promotor Vermulst, Bas J.D., Co-Promotor Lemmen, Erik, Co-Promotor
Datum van toekenning	13 sep. 2023
Plaats van publicatie	Eindhoven
Uitgever	Eindhoven University of Technology
Gedrukte ISBN's	978-90-386-5618-6
Status	Gepubliceerd - 13 sep. 2023

Proefschrift.

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@phdthesis{0e0d8f9bab824fb7956ed77f961cb593,

title = "Power Electronics for Plasma Processing: Enabling Energy-Efficient and Accurate Ion Energy Control for Semiconductor Manufacturing",

author = "Qihao Yu",

note = "Proefschrift.",

year = "2023",

month = sep,

day = "13",

language = "English",

isbn = "978-90-386-5618-6",

publisher = "Eindhoven University of Technology",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Electrical Engineering",

}