Post-bonding fabrication of photonic devices in an Indium phosphide membrane bonded on glass

J. Pello, P. Saboya, S. Keyvaninia, J.J.G.M. Tol, van der, G. Roelkens, H.P.M.M. Ambrosius, M.K. Smit

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Samenvatting

We demonstrate the successful fabrication of passive photonic devices in a 300-nm thick Indium phosphide (InP) membrane bonded on glass, using a post-bonding fabrication scheme. Our results show that post-bonding processing can be used to allow double-side processing of InP membrane devices. Furthermore, the yield in InP membrane fabrication can be increased by bonding the membrane prior to patterning. Characterization results show good performance in power splitters and ring resonators (Q ~ 15,000). However, waveguide losses were found to be very high (25 dB/cm) and need to be reduced by e.g. optimizing the lithography steps.
Originele taal-2Engels
Pagina's213-216
StatusGepubliceerd - 2011
Evenement16th Annual Symposium of the IEEE Photonics Benelux Chapter, December 1-2, 2011, Ghent, Belgium - Ghent, België
Duur: 1 dec 20112 dec 2011
http://www.photonics-benelux.org/symp11/

Congres

Congres16th Annual Symposium of the IEEE Photonics Benelux Chapter, December 1-2, 2011, Ghent, Belgium
LandBelgië
StadGhent
Periode1/12/112/12/11
Ander16th Annual Symposium of the IEEE Photonics Benelux Chapter
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Bibliografische nota

Editor(s): Bienstman, P.; Morthier, G.; Roelkens, G.; et al.
Proceedings of the 16th Annual symposium of the IEEE Photonics Benelux Chapter, 01-02 December 2011, Ghent, Belgium

Citeer dit

Pello, J., Saboya, P., Keyvaninia, S., Tol, van der, J. J. G. M., Roelkens, G., Ambrosius, H. P. M. M., & Smit, M. K. (2011). Post-bonding fabrication of photonic devices in an Indium phosphide membrane bonded on glass. 213-216. Postersessie gepresenteerd op 16th Annual Symposium of the IEEE Photonics Benelux Chapter, December 1-2, 2011, Ghent, Belgium, Ghent, België.