Samenvatting
The at. state distribution function (ASDF) of hydrogen was numerically modeled as a function of electron d., electron temp. and neutral d., by means of a collisional-radiative modeling code. Two limiting cases regarding the hydrogen dissocn. degree were considered, namely 0% and 100% dissocn. Optical emission spectroscopy on the hydrogen Balmer series was used to exptl. obtain the ASDF from a capacitively coupled parallel plate RF hydrogen discharge. This type of discharge is typically used for amorphous and microcryst. silicon solar cell deposition. Preliminary measurements allow a comparison of exptl. and numerically obtained ASDF. The discussion treats how both model and expt. can be improved to obtain a better correlation. [on SciFinder (R)]
Originele taal-2 | Engels |
---|---|
Titel | International Conference on Phenomena in Ionized Gases, Proceedings, 27th, Eindhoven, Netherlands, July 18-22, 2005 |
Redacteuren | E.M. Veldhuizen, van |
Plaats van productie | Eindhoven |
Uitgeverij | Eindhoven University of Technology |
Pagina's | 08- |
Status | Gepubliceerd - 2005 |
Evenement | 27th International Conference on Phenomena in Ionized Gases (ICPIG 2005) - Eindhoven, Nederland Duur: 17 jul. 2005 → 22 jul. 2005 |
Congres
Congres | 27th International Conference on Phenomena in Ionized Gases (ICPIG 2005) |
---|---|
Verkorte titel | ICPIG 2005 |
Land/Regio | Nederland |
Stad | Eindhoven |
Periode | 17/07/05 → 22/07/05 |
Ander | 27th International Conference on Phenomena in Ionised Gases : ICPIG 2005, Eindhoven |