Population densities of excited atomic hydrogen as diagnostic tool to study an RF hydrogen discharge

M.N. van den Donker, D. Jedrzejczyk, J. Klomfass, A. Hartgers, W.M.M. Kessels, M.C.M. Sanden, van de, B. Rech

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Samenvatting

The at. state distribution function (ASDF) of hydrogen was numerically modeled as a function of electron d., electron temp. and neutral d., by means of a collisional-radiative modeling code. Two limiting cases regarding the hydrogen dissocn. degree were considered, namely 0% and 100% dissocn. Optical emission spectroscopy on the hydrogen Balmer series was used to exptl. obtain the ASDF from a capacitively coupled parallel plate RF hydrogen discharge. This type of discharge is typically used for amorphous and microcryst. silicon solar cell deposition. Preliminary measurements allow a comparison of exptl. and numerically obtained ASDF. The discussion treats how both model and expt. can be improved to obtain a better correlation. [on SciFinder (R)]
Originele taal-2Engels
TitelInternational Conference on Phenomena in Ionized Gases, Proceedings, 27th, Eindhoven, Netherlands, July 18-22, 2005
RedacteurenE.M. Veldhuizen, van
Plaats van productieEindhoven
UitgeverijEindhoven University of Technology
Pagina's08-
StatusGepubliceerd - 2005
Evenement27th International Conference on Phenomena in Ionized Gases (ICPIG 2005) - Eindhoven, Nederland
Duur: 17 jul. 200522 jul. 2005

Congres

Congres27th International Conference on Phenomena in Ionized Gases (ICPIG 2005)
Verkorte titelICPIG 2005
Land/RegioNederland
StadEindhoven
Periode17/07/0522/07/05
Ander27th International Conference on Phenomena in Ionised Gases : ICPIG 2005, Eindhoven

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