Plasma-surface interaction during the growth of silicon and carbon thin films: in situ plasma and surface studies

Onderzoeksoutput: Bijdrage aan congres › Other › Academic

Originele taal-2	Engels
Status	Gepubliceerd - 2009
Evenement	conference; Institut für Energieforschung – Plasmaphysik; 2009-01-23; 2009-01-23 - Duur: 23 jan. 2009 → 23 jan. 2009

Congres	conference; Institut für Energieforschung – Plasmaphysik; 2009-01-23; 2009-01-23
Periode	23/01/09 → 23/01/09
Ander	Institut für Energieforschung – Plasmaphysik

Citeer dit

@conference{b25f7bd70b5842d89320fda6ac739889,

title = "Plasma-surface interaction during the growth of silicon and carbon thin films: in situ plasma and surface studies",

author = "{Sanden, van de}, M.C.M.",

year = "2009",

language = "English",

note = "conference; Institut f{\"u}r Energieforschung – Plasmaphysik; 2009-01-23; 2009-01-23 ; Conference date: 23-01-2009 Through 23-01-2009",

}