Plasma deposition processes

D.C. Schram, M.C.M. Sanden, van de, J.W.A.M. Gielen, R.J. Severens, R.M.J. Paffen

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

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Samenvatting

A review with 29 refs. focused on the deposition of Si films and thin films of amorphous hydrogenated carbon. With plasma deposition, many materials can be deposited, varying from cryst. (e.g. diamond, graphite) to polycryst. and amorphous films. Plasmas offer nearly unlimited choice of materials, a large versatility in conditions and efficient use of monomers and energy. The various approaches used nowadays are discussed together with a crit. evaluation of the various processes occurring in the plasma and in the plasma wall interaction. The various subprocesses (e.g., ionization, fragmentation, adsorption, and desorption) and recirculation are illustrated with examples taken from high d. plasma deposition. Conclusions were drawn on future outlook. [on SciFinder (R)]
Originele taal-2Engels
TitelSurface Modification Technologies IX : proceedings of the International Conference on Surface Modification Technologies, 9th, Cleveland, Oct. 29-Nov. 2, 1995
RedacteurenT.S. Sudarshan, W. Reitz, J.J. Stiglich
Plaats van productieMinerals, Metals and Materials Society
UitgeverijWarrendale
Pagina's383-399
ISBN van geprinte versie0-87339-295-7
StatusGepubliceerd - 1996
Evenement9th International Conference on Surface Modification Technologies - Cleveland
Duur: 29 okt 19962 nov 1996

Publicatie series

NaamBook Institute of Metals
Volume637

Congres

Congres9th International Conference on Surface Modification Technologies
StadCleveland
Periode29/10/962/11/96

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    Schram, D. C., Sanden, van de, M. C. M., Gielen, J. W. A. M., Severens, R. J., & Paffen, R. M. J. (1996). Plasma deposition processes. In T. S. Sudarshan, W. Reitz, & J. J. Stiglich (editors), Surface Modification Technologies IX : proceedings of the International Conference on Surface Modification Technologies, 9th, Cleveland, Oct. 29-Nov. 2, 1995 (blz. 383-399). (Book Institute of Metals; Vol. 637). Warrendale.