Plasma-assisted atomic layer deposition of AI2O3 on polymer for moisture diffusion barrier applications

E. Langereis; M. Heil; M. Creatore; M.C.M. Sanden, van de; W.M.M. Kessels

Plasma-assisted atomic layer deposition of AI2O3 on polymer for moisture diffusion barrier applications

E. Langereis, M. Heil, M. Creatore, M.C.M. Sanden, van de, W.M.M. Kessels

Onderzoeksoutput: Bijdrage aan congres › Poster

Samenvatting

No abstract

Originele taal-2	Engels
Pagina's	O 11-
Status	Gepubliceerd - 2006
Evenement	18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands - Lunteren, Nederland Duur: 22 mrt. 2006 → 23 mrt. 2006

Congres

Congres	18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands
Land/Regio	Nederland
Stad	Lunteren
Periode	22/03/06 → 23/03/06
Ander	18th Symposium Plasma Physics and Radiation Technology, 22-23 March 2006, Lunteren, The Netherlands

Bibliografische nota

18th symposium plasma physics and radiation technology : March 22-23, 2006, Lunteren : programme and abstracts

Citeer dit

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title = "Plasma-assisted atomic layer deposition of AI2O3 on polymer for moisture diffusion barrier applications",

abstract = "No abstract",

author = "E. Langereis and M. Heil and M. Creatore and {Sanden, van de}, M.C.M. and W.M.M. Kessels",

note = "18th symposium plasma physics and radiation technology : March 22-23, 2006, Lunteren : programme and abstracts; 18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands ; Conference date: 22-03-2006 Through 23-03-2006",

year = "2006",

language = "English",

pages = "O 11--",

}

Plasma-assisted atomic layer deposition of AI2O3 on polymer for moisture diffusion barrier applications. / Langereis, E.; Heil, M.; Creatore, M. et al.
2006. O 11- Postersessie gepresenteerd op 18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands, Lunteren, Nederland.

Onderzoeksoutput: Bijdrage aan congres › Poster

TY - CONF

T1 - Plasma-assisted atomic layer deposition of AI2O3 on polymer for moisture diffusion barrier applications

AU - Langereis, E.

AU - Heil, M.

AU - Creatore, M.

AU - Sanden, van de, M.C.M.

AU - Kessels, W.M.M.

N1 - 18th symposium plasma physics and radiation technology : March 22-23, 2006, Lunteren : programme and abstracts

PY - 2006

Y1 - 2006

N2 - No abstract

AB - No abstract

M3 - Poster

SP - O 11-

T2 - 18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands

Y2 - 22 March 2006 through 23 March 2006

ER -

Plasma-assisted atomic layer deposition of AI2O3 on polymer for moisture diffusion barrier applications

Samenvatting

Congres

Bibliografische nota

Vingerafdruk

Citeer dit