@conference{2565f5284c2341a2aa4403785aa6d33c,
title = "Plasma-assisted atomic layer deposition of AI2O3 films",
author = "S.B.S. Heil and E. Langereis and \{Sanden, van de\}, M.C.M. and W.M.M. Kessels",
note = "18th symposium plasma physics and radiation technology : March 22-23, 2006, Lunteren : programme and abstracts; 18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands ; Conference date: 22-03-2006 Through 23-03-2006",
year = "2006",
language = "English",
pages = "A 18--",
}