Plasma-assisted ALD of LiPO(N) for solid state batteries

B. Put, M.J. Mees, N. Hornsveld, A. Sepúlveda, P.M. Vereecken, W.M.M. Kessels, M. Creatore

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

11 Citaten (Scopus)
190 Downloads (Pure)


All solid state 3D batteries are pursued for their increased safety and high power capabilities. At present conformai coating of the solid electrolyte remains one of the key hurdles for the implementation of such devices. In the present work we investigate atomic layer deposition (ALD) as means of conformai deposition of lithium phosphate (Li3PO4) and nitrogen doped lithium phosphates (LiPON). These processes are characterized here to obtain the highest possible Li-ion conductivity. Li3PO4 is shown to yield a conductivity of 10-10 S/cm. On the other hand, an optimized LiPON process gave rise to a Li-ion conductivity of 510-7 S/cm. In addition, good conformality of the LiPON process was shown on high aspect ratio pillars. Furthermore, a solid state battery device was fabricated comprising a Li4Ti5O12 cathode, a 70 nm thick ALD LiPON solid electrolyte and a metallic lithium anode. The fabricated device is based on the thinnest solid electrolyte used so far as well as on the first ALD deposited solid electrolyte.

Originele taal-2Engels
TitelLi-Ion Batteries
UitgeverijElectrochemical Society, Inc.
Aantal pagina's9
ISBN van elektronische versie9781607685395
StatusGepubliceerd - 2016
EvenementPassific Rime Meeting on Electrochemical an Solid State Science (PRiME2016) - Honolulu, Verenigde Staten van Amerika
Duur: 2 okt 20167 okt 2016

Publicatie series

NaamECS Transactions
ISSN van geprinte versie1938-6737


CongresPassific Rime Meeting on Electrochemical an Solid State Science (PRiME2016)
Verkorte titelPRIME 2016
LandVerenigde Staten van Amerika
Internet adres

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