Plasma-assisted ALD of LiPO(N) for solid state batteries

B. Put, M.J. Mees, N. Hornsveld, A. Sepúlveda, P.M. Vereecken, W.M.M. Kessels, M. Creatore

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

10 Citaties (Scopus)
105 Downloads (Pure)

Uittreksel

All solid state 3D batteries are pursued for their increased safety and high power capabilities. At present conformai coating of the solid electrolyte remains one of the key hurdles for the implementation of such devices. In the present work we investigate atomic layer deposition (ALD) as means of conformai deposition of lithium phosphate (Li3PO4) and nitrogen doped lithium phosphates (LiPON). These processes are characterized here to obtain the highest possible Li-ion conductivity. Li3PO4 is shown to yield a conductivity of 10-10 S/cm. On the other hand, an optimized LiPON process gave rise to a Li-ion conductivity of 510-7 S/cm. In addition, good conformality of the LiPON process was shown on high aspect ratio pillars. Furthermore, a solid state battery device was fabricated comprising a Li4Ti5O12 cathode, a 70 nm thick ALD LiPON solid electrolyte and a metallic lithium anode. The fabricated device is based on the thinnest solid electrolyte used so far as well as on the first ALD deposited solid electrolyte.

Originele taal-2Engels
TitelLi-Ion Batteries
UitgeverijElectrochemical Society, Inc.
Pagina's61-69
Aantal pagina's9
ISBN van elektronische versie9781607685395
DOI's
StatusGepubliceerd - 2016
EvenementPassific Rime Meeting on Electrochemical an Solid State Science (PRiME2016) - Honolulu, Verenigde Staten van Amerika
Duur: 2 okt 20167 okt 2016
http://prime-intl.org/

Publicatie series

NaamECS Transactions
Nummer20
Volume75
ISSN van geprinte versie1938-6737

Congres

CongresPassific Rime Meeting on Electrochemical an Solid State Science (PRiME2016)
Verkorte titelPRIME 2016
LandVerenigde Staten van Amerika
StadHonolulu
Periode2/10/167/10/16
Internet adres

Vingerafdruk

Atomic layer deposition
Solid electrolytes
Plasmas
Lithium
Phosphates
Ions
Aspect ratio
Anodes
Cathodes
Nitrogen
Coatings

Citeer dit

Put, B., Mees, M. J., Hornsveld, N., Sepúlveda, A., Vereecken, P. M., Kessels, W. M. M., & Creatore, M. (2016). Plasma-assisted ALD of LiPO(N) for solid state batteries. In Li-Ion Batteries (blz. 61-69). (ECS Transactions; Vol. 75, Nr. 20). Electrochemical Society, Inc.. https://doi.org/10.1149/07520.0061ecst
Put, B. ; Mees, M.J. ; Hornsveld, N. ; Sepúlveda, A. ; Vereecken, P.M. ; Kessels, W.M.M. ; Creatore, M. / Plasma-assisted ALD of LiPO(N) for solid state batteries. Li-Ion Batteries. Electrochemical Society, Inc., 2016. blz. 61-69 (ECS Transactions; 20).
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abstract = "All solid state 3D batteries are pursued for their increased safety and high power capabilities. At present conformai coating of the solid electrolyte remains one of the key hurdles for the implementation of such devices. In the present work we investigate atomic layer deposition (ALD) as means of conformai deposition of lithium phosphate (Li3PO4) and nitrogen doped lithium phosphates (LiPON). These processes are characterized here to obtain the highest possible Li-ion conductivity. Li3PO4 is shown to yield a conductivity of 10-10 S/cm. On the other hand, an optimized LiPON process gave rise to a Li-ion conductivity of 510-7 S/cm. In addition, good conformality of the LiPON process was shown on high aspect ratio pillars. Furthermore, a solid state battery device was fabricated comprising a Li4Ti5O12 cathode, a 70 nm thick ALD LiPON solid electrolyte and a metallic lithium anode. The fabricated device is based on the thinnest solid electrolyte used so far as well as on the first ALD deposited solid electrolyte.",
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Put, B, Mees, MJ, Hornsveld, N, Sepúlveda, A, Vereecken, PM, Kessels, WMM & Creatore, M 2016, Plasma-assisted ALD of LiPO(N) for solid state batteries. in Li-Ion Batteries. ECS Transactions, nr. 20, vol. 75, Electrochemical Society, Inc., blz. 61-69, Passific Rime Meeting on Electrochemical an Solid State Science (PRiME2016), Honolulu, Verenigde Staten van Amerika, 2/10/16. https://doi.org/10.1149/07520.0061ecst

Plasma-assisted ALD of LiPO(N) for solid state batteries. / Put, B.; Mees, M.J.; Hornsveld, N.; Sepúlveda, A.; Vereecken, P.M.; Kessels, W.M.M.; Creatore, M.

Li-Ion Batteries. Electrochemical Society, Inc., 2016. blz. 61-69 (ECS Transactions; Vol. 75, Nr. 20).

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

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AU - Put, B.

AU - Mees, M.J.

AU - Hornsveld, N.

AU - Sepúlveda, A.

AU - Vereecken, P.M.

AU - Kessels, W.M.M.

AU - Creatore, M.

PY - 2016

Y1 - 2016

N2 - All solid state 3D batteries are pursued for their increased safety and high power capabilities. At present conformai coating of the solid electrolyte remains one of the key hurdles for the implementation of such devices. In the present work we investigate atomic layer deposition (ALD) as means of conformai deposition of lithium phosphate (Li3PO4) and nitrogen doped lithium phosphates (LiPON). These processes are characterized here to obtain the highest possible Li-ion conductivity. Li3PO4 is shown to yield a conductivity of 10-10 S/cm. On the other hand, an optimized LiPON process gave rise to a Li-ion conductivity of 510-7 S/cm. In addition, good conformality of the LiPON process was shown on high aspect ratio pillars. Furthermore, a solid state battery device was fabricated comprising a Li4Ti5O12 cathode, a 70 nm thick ALD LiPON solid electrolyte and a metallic lithium anode. The fabricated device is based on the thinnest solid electrolyte used so far as well as on the first ALD deposited solid electrolyte.

AB - All solid state 3D batteries are pursued for their increased safety and high power capabilities. At present conformai coating of the solid electrolyte remains one of the key hurdles for the implementation of such devices. In the present work we investigate atomic layer deposition (ALD) as means of conformai deposition of lithium phosphate (Li3PO4) and nitrogen doped lithium phosphates (LiPON). These processes are characterized here to obtain the highest possible Li-ion conductivity. Li3PO4 is shown to yield a conductivity of 10-10 S/cm. On the other hand, an optimized LiPON process gave rise to a Li-ion conductivity of 510-7 S/cm. In addition, good conformality of the LiPON process was shown on high aspect ratio pillars. Furthermore, a solid state battery device was fabricated comprising a Li4Ti5O12 cathode, a 70 nm thick ALD LiPON solid electrolyte and a metallic lithium anode. The fabricated device is based on the thinnest solid electrolyte used so far as well as on the first ALD deposited solid electrolyte.

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BT - Li-Ion Batteries

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Put B, Mees MJ, Hornsveld N, Sepúlveda A, Vereecken PM, Kessels WMM et al. Plasma-assisted ALD of LiPO(N) for solid state batteries. In Li-Ion Batteries. Electrochemical Society, Inc. 2016. blz. 61-69. (ECS Transactions; 20). https://doi.org/10.1149/07520.0061ecst