Plasma-assisted ALD : from basic understanding to successful commercialization

W.M.M. Kessels, C.J. Hodson, Q. Fang, N. Singh, F. Anderson, W. Keuning, Stephan Heil, Hans Hemmen, van, E. Langereis, M.C.M. Sanden, van de

Onderzoeksoutput: Bijdrage aan congresOtherAcademic

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Originele taal-2Engels
Aantal pagina's11
StatusGepubliceerd - 2009
EvenementNetherlands MicroNano Conference '09, Delft, the Netherlands - Delft, Nederland
Duur: 5 nov 20096 nov 2009

Congres

CongresNetherlands MicroNano Conference '09, Delft, the Netherlands
LandNederland
StadDelft
Periode5/11/096/11/09
AnderNetherlands MicroNano Conference '09

Citeer dit

Kessels, W. M. M., Hodson, C. J., Fang, Q., Singh, N., Anderson, F., Keuning, W., ... Sanden, van de, M. C. M. (2009). Plasma-assisted ALD : from basic understanding to successful commercialization. Netherlands MicroNano Conference '09, Delft, the Netherlands, Delft, Nederland.